Abstract: Spiral inductors plays an important role in RF circuits, conventional spiral inductors can be analyzed by equivalent circuit model of lumped parameter, and due to high frequency characteristics, its electromagnetic coupling characteristics is generally not given in high frequency electronic device manual. As to this problem, with the purpose of studying the electromagnetic coupling characteristics of spiral inductors, the model of spiral inductor is built by Finite Element Method, and its high frequency electromagnetic field coupling characteristics is analyzed by simulation to obtain a series of electromagnetic field coupling features of spiral inductor. The analysis of spiral inductor by using of electromagnetic field theory and finite element method software HFSS can reflect variation characteristics of inductor influenced by frequency, which can be applied to the design of RFIC.